m130mdmp110spr1lvdt1wire1wire2wire3wire4wire5wire6d1d2d3d4d5d6d7d8r11kr2100kr31kr51kr71kr8500kr_osc10op1vsrc1frequency=2.5kpeak_voltage=5c11uc21ur10500kForcefrcgen1v_out_sensorr4100kposition_slider